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IQ Aligner® - Automated UV-NIL System

For semi-automatic or fully-automatic single and double-side UV-NIL processes.

The IQ Aligner UV-NIL System allows for micromolding and nanoimprinting processes with stamps and wafers from 150 mm to 300mm diameter. Uniform contact force for high yield large area printing is provided by EV Group's proprietary chuck design which supports both soft and hard stamps. Configurations include release mechanisms for stamps from imprinted substrates more info......