EVG®770 Automated NIL Stepper

For step and repeat large area UV-Nanoimprinting processes (UV-NIL).

EV Group's EVG770 Automated NIL Stepper is designed for step and repeat large area UV-Nanoimprint Lithography (UV-NIL) processes compatible for 100 mm up to 300 mm wafers. The NIL Stepper covers applications like  life science, optical components, mastering, 3D-Lithography and R&D for semiconductor devices more info....